SiC सिरेमिक

SiC ceramics are used more and more in semiconductor equipment, mainly because they hold up better in tougher conditions. When temperature gets high or the process becomes more aggressive, materials like quartz or silicon can start to show limits, and that’s usually where SiC comes in. In furnace processes such as oxidation or diffusion, parts like wafer boats or paddles made from SiC tend to last longer. They keep their shape and don’t bring in much contamination, even after long runs. People often switch from quartz for this reason, especially when maintenance becomes too frequent.

For etching, SiC is often chosen simply because it survives plasma longer. The lifetime difference compared with silicon parts is noticeable in many setups, though it still depends on the exact process. It also helps a bit with particle control, which becomes more sensitive as nodes shrink. You’ll also see SiC used as susceptors in MOCVD or CVD. In those cases, it’s less about “strength” and more about keeping temperature behavior stable. Outside of that, it shows up in chamber parts like liners or showerheads, and sometimes in handling components as well.